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Bio

ANDREW GRENVILLE, INPRIA
CO-FOUNDER & CEO

Andrew Grenville is co-founder and CEO of Inpria Corporation, a venture-backed advanced materials startup commercializing metal oxide photoresists to unlock the full potential of EUV lithography. He brings decades of experience commercializing  scalable solutions at the intersection of materials and equipment. Prior to founding Inpria, Grenville held leadership roles at Intel & SEMATECH where he propelled key components of 193nm lithography, immersion lithography, and EUVL from research concepts to integral components in realizing Moore’s Law. Grenville holds a Ph.D. in Applied Physics from Stanford.

 

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Presentation abstract

REIMAGINING EUV PHOTORESISTS: THE PATH FROM IDEA TO SCALEUP ENABLED BY IMEC'S INNVOATION HUB

EUV lithography (EUVL) is delivering the substantial patterning improvements required to fuel continued semiconductor scaling. Photoresist is a critical element of any lithography technology, but conventional organic chemistries have hit fundamental physical limits in the shift to EUVL. Inpria Corporation was founded to develop and manufacture photoresists purpose-built for EUVL. With a metal oxide foundation, Inpria photoresists are uniquely designed to absorb valuable EUV photons efficiently, resolve features with high fidelity, and provide extremely robust pattern transfer layers for etch. Inpria photoresists provide customers enhanced process windows, reduced process complexity, and demonstrated capability for future EUVL generations.

The path from research concept to early manufacturing for leading-edge semiconductor fabrication materials requires many disparate puzzle pieces: a multidisciplinary team at the forefront of chemistry and material science, access to a full suite of relevant fab equipment in an open innovation environment, and supportive partners with a common vision. Inpria has served as a catalyst and vehicle for both developing a new photoresist platform and a network of strategic partners. IMEC has played a vital and complementary role by providing the critical environment and team to bring together those partners to reduce risk in a capital efficient manner. Here, we relate the history, lessons learned and future opportunities.

 

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